Extended Data Fig. 2: False color SEM micrographs of the devices.

a, Two bi-directional IDTs arranged in a delay-line geometry, zoomed-out view of Fig. 1b of the main text. Same for single mode IDTs (b) and unidirectional IDTs (c). d, A single unidirectional IDT is used to couple to an acoustic resonator. GND denotes electrical ground and CPW denotes coplanar waveguide.