Atomically thin single-crystalline high-κ dielectrics can be grown directly on a two-dimensional semiconductor by van der Waals epitaxy, providing ultrathin gate stacks with excellent interface quality.
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Shin, HJ. Growing single-crystalline antimony oxide with van der Waals epitaxy. Nat Electron (2026). https://doi.org/10.1038/s41928-026-01589-1
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DOI: https://doi.org/10.1038/s41928-026-01589-1
