Table 1 Properties of candidate resonators: these properties of the mechanical resonators are used to produce the calculations throughout this paper.
From: Gravitational wave detectors with broadband high frequency sensitivity
Parameter | Symbol | Value |
|---|---|---|
Phononic crystal | ||
Refractive index (Si3N4) | \({n}_{{\rm{SiN}}}\) | 1.98 |
Membrane thickness | hm | 20 nm |
Mechanical frequency | ωm/(2π) | 1.135 MHz |
Mechanical Q-factor | Qm | 1.03 × 109 |
Acoustic bandgap | 1.07–1.28 MHz | |
Effective mass | Meff | 2.3 ng |
Bulk acoustic wave resonator | ||
Refractive index (quartz) | nQ | 1.54 |
Density (quartz) | ρ | 2648 kg m−3 |
Speed of sound (quartz) | vQ | 6327 m s−1 |
Crystal thickness | q0 | 1 mm |
Crystal radius | rc | 15 mm |
Radius of curvature of convex face | R | 300 mm |
Longitudinal mode number | m | 65 |
Mechanical frequency | ωm/(2π) | 204 MHz |
Mechanical Q-factor | Qm | 8 × 109 |
Optomechanical shift (5 cm cavity) | dω/dq | 2π × 7.5 MHz nm−1 |
Effective mass | Meff | 0.56 mg |
Mode radius | rmode | 260 μm |
