Fig. 4: Elemental analysis of an in-plane longitudinal SiGe heterostructure laser-written at a scan speed of 200 mm s−1.

a High-angle annular dark-field image (HAADF) showing the material contrast at the cross-section of the laser-processed region. b Energy-dispersive X-ray spectroscopy (EDX) and c phase-field simulation results showing spatial redistribution of the alloy composition at the cross-section for 2D comparison. The color scale applies to both figures in b, c. d Quantitative comparison between the experimental (blue solid line) and simulated (red dashed line) Ge concentration along the depth profile across the cross-section, as marked by a white arrow in a. The experimental error margin in the EDX data is 5%.