Fig. 1: Illustrating the principle of pop-out 3D metrology with transmission electron microscopy (TEM). | Communications Physics

Fig. 1: Illustrating the principle of pop-out 3D metrology with transmission electron microscopy (TEM).

From: Single-shot, coherent, pop-out 3D metrology

Fig. 1: Illustrating the principle of pop-out 3D metrology with transmission electron microscopy (TEM).The alternative text for this image may have been generated using AI.

a Schematic of bright-field TEM (BF-TEM). A thinner feature (right half) scatters fewer electrons and forms the brighter right half of the TEM image; it is also placed nearer to the focal plane. Hence its contrast transfer function (CTF) has fewer Thon rings than the thicker feature, as we can see from the Fourier transforms of the patches p1 and p2 (red squares). b Applying the pop-out metrology technique to a 2048×2048 pixel simulated BF-TEM image of a 3D model (ground truth). The recovered average longitudinal centre of mass (defocus map) and the sample thickness map shown in the image were used to reconstruct the 3D volume.

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