Fig. 5: Development of lattice parameter with increasing bilayer period.
From: Mechanistic study of superlattice-enabled high toughness and hardness in MoN/TaN coatings
Diamond symbols in (a) show the obtained lattice plane distances from the XRD patterns of our superlattices on Si (100), Fig. 4a. The out-of-plane d200 lattice planes for ζ-TaN, Ta0.75N, MoN0.5, MoN0.5/ ζ-TaN, and MoN0.5/Ta0.75N are indicated with horizontal lines in (a). The results for the coating with Λ = 13.1 nm are obtained from films grown on MgO, as their the 200 XRD peak was more distinct (compare Fig. 4 and Supplementary Fig. S1). Data points in stars are obtained by calculating the average. The right side of a shows in-plane and out-of-plane lattice plane distances obtained from our synchrotron experiments. In (b) the unit cell of the superlattice with Λ = 1.72 nm is shown.
