Table 1 Nominal and measured bilayer periods.
From: Mechanistic study of superlattice-enabled high toughness and hardness in MoN/TaN coatings
Λnom (nm) | ΛSEM (nm) | ΛXRD (nm) | ΛTEM (nm) |
|---|---|---|---|
1.5 | 1.49±0.01 | 1.40±0.10 | – |
3.0 | 2.67±0.01 | 2.69±0.12 | 2.9 |
6.0 | 5.17±0.04 | 5.28±0.24 | – |
9.0 | 8.32±0.04 | 8.71±0.62 | 8.5 |
15.0 | 13.1±0.20 | 14.0±1.68 | – |
45.0 | 43.3±0.06 | – | – |
