Fig. 1: Design of the ultrathin TiOx TFT and its structural characterization.
From: Large mobility modulation in ultrathin amorphous titanium oxide transistors
a Schematic of the TiOx TFT device investigated; b XRD pattern acquired from 3.5-nm-thick TiOx thin film displaying no significant crystallinity except for weak scattering peaks potentially corresponding to anatase/rutile phases. The inset shows LEED image of the TiOx thin film where the lack of any discernable crystalline peaks confirms the near amorphous structure of ultrathin TiOx.
