Fig. 3: Roughness and grain analysis.
From: Low-loss superconducting resonators fabricated from tantalum films grown at room temperature
a, b AFM topography images of HT and RT Ta films surface, with different field of view and color scale. c, d Electron back-scattering diffraction maps showing (c) the color-coded growth direction of few HT Ta grains and d the false-color large-scale view of HT Ta grains. e Transmission Kikuchi diffraction map of a cross-section of an RT Ta film. The color code represents the growth direction as in (c).
