Fig. 3: Printing of Ga₂O₃-based X-ray detector arrays.

a Design diagram of the interdigitated electrode, the upper figure shows the detailed parameters of a single interdigitated electrode, and the lower figure shows the layout of the interdigitated electrode array, with the array size of 8 × 8. b Flow chart of electrode evaporation, firstly, the mask is fixed on the prepared Ga₂O₃ thin film, and then after fixing it completely, PVD evaporation is carried out, and then after the evaporation is completed, the mask is removed and the electrode array is obtained. c Photographs of electrode array, it can be seen that the evaporation electrode layout is very even and clear. d Individual electrodes under SEM, under this scale, the electrodes still maintain a very clear contour as well as a homogeneous surface, and the inserted teeth are not distorted and fuzzy, and other defects appear.