Fig. 3: Cross-sectional STEM-EDX chemical maps.
From: Sub-unit cell engineering of CrVO3 superlattice thin films
All data were acquired along the \(\langle 1\bar{2}10\rangle\) zone axis, with the 3 ML, 2 ML, and 1 ML samples arranged from left to right. The top row contains the HAADF-STEM images with the corresponding STEM-EDX maps, and the bottom row shows the intensity profiles extracted from the maps. V and Cr distributions are mapped using the intensity of their respective Kα lines. The 3 ML sample map was processed with a Wiener filter, while the corresponding intensity profile presents the unfiltered data. At the bottom, a portion of the Cr2O3 buffer layer is also visible. To minimize the impact of surface steps on the chemical maps, the 2 ML and 1 ML samples were imaged from FIB lamellae thinner than 20 nm. Given the short interlayer distances of the 2 ML and 1 ML films, multi-frame imaging and spectroscopy data were acquired and aligned to correct for sample drift and scanning distortions. All scalebars represent 5 nm.
