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  • Perspective
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Boron nitride for applications in microelectronics

Nature Reviews Electrical Engineering volume 2, pages 205–214 (2025)Cite this article

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Abstract

In this Perspective, we survey recent research on boron nitride (BN) including synthesis, integration and simulation aspects from the material engineering perspective for applications in microelectronics industry. First, we discuss the BN history and its process development milestones, with an emphasis on amorphous BN and hexagonal BN deposition process, highlighting the need for deep understanding of precursor and surface chemistry as well as integration issues. Next, we summarize recent material synthesis simulation progress for BN in the context of tackling complex amorphous material network formation mechanisms and discuss new methodology development needs to address current challenges. We propose future research directions towards the co-development between experimental and modelling approaches to further accelerate discovery of additional material property improvements. Finally, overall trends in microelectronic applications of BN and perspectives are presented and categorized into two main directions.

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Fig. 1: Brief history of boron nitride.
Fig. 2: Workflow for simulation–experiment iteration.
Fig. 3: Experiment–simulation co-development.

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Acknowledgements

The authors gratefully acknowledge support from the Material Analysis Team from Taiwan Semiconductor Manufacturing Company in characterization.

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  1. Pathfinding, R&D, Taiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan

    Szu-Hua Chen, Wei-Yen Woon & Szuya Sandy Liao

  2. TCADD, R&D, Taiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan

    Blanka Magyari-Kope & Chuang-Han Hsu

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S.-H.C., C.-H.H., B.M.-K. and W.-Y.W. researched data for the article. All authors contributed substantially to discussion of the content. S.-H.C., B.M.-K. and W.-Y.W. wrote the article. All authors reviewed and/or edited the manuscript before submission.

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Chen, SH., Magyari-Kope, B., Hsu, CH. et al. Boron nitride for applications in microelectronics. Nat Rev Electr Eng 2, 205–214 (2025). https://doi.org/10.1038/s44287-025-00141-1

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