Figure 1
From: Robustness of plasmon phased array nanoantennas to disorder

Scanning electron microscope images of
a) the smallest Yagi-Uda antenna used (YU5) and b) a Yagi-Uda antenna on a bridge Si3N4 waveguide with 1000 nm width. c) Sketch of sample geometry. Outcoupling gratings are fabricated in the waveguide using focused ion beam milling at 6 μm distance from the antenna, on each side. The gratings in d) have a pitch of 600 nm and a duty cycle of 50%.