Table 1 Thin film surface termination and stoichiometry.

From: Surface Termination Conversion during SrTiO3 Thin Film Growth Revealed by X-ray Photoelectron Spectroscopy

Fluence (J.cm−2)

SrO-term, A

1.05

100%

54.0 ± 2.0%

1.44

76%

49.8 ± 1.6%

1.62

0%

48.5 ± 1.6%

2.25

0%

47.7 ± 1.6%