Figure 1
Three-dimensional AFM topography images of the pristine Pt/Sapphire (a) and the Ti-implanted Pt/Sapphire with Ti fluence of 5 × 1015 cm−2 (b), 1 × 1016 cm−2 (c) and 5 × 1016 cm−2 (d).The scanning size is 3 × 3 μm2. The mean arithmetic roughness (Ra) is 3.98 nm, 2.24 nm, 1.15 nm and 4.99 nm, respectively. The AFM color scale (right side) indicates the height information.
