Figure 2

Cross-sectional TEM images and corresponding selected area electron diffraction (SAED) patterns from the ion implanted regions (I,III) and past ion end-of-range (II,IV) for:
(a) α-quartz single crystal and (b) calcite single crystal. (a-I) shows the amorphization of α-quartz, while (b-III) shows the lack of amorphization in calcite. Ion implantation was carried out at an energy of 400 keV using Ar+-ions for a total fluence of 1.0 × 1014 Ar+/cm2 at room temperature. The free-sample surface is located towards the left extremity of the image(s).