Table 1 Elemental compositions in TiO2/Cu/TiO2 heat reflector structure with total TiO2 thickness of 100 nm.
Region 1 | Region 2 | Region 3 | Region 4 | Region 5 | |||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
Cu (%) | Ti (%) | O (%) | Cu (%) | Ti (%) | O (%) | Cu (%) | Ti (%) | O (%) | Cu (%) | Ti (%) | O (%) | Cu (%) | Ti (%) | O (%) | |
AsD | 3 | 53 | 44 | 3 | 57 | 40 | 92 | 4 | 4 | 3 | 54 | 33 | 3 | 55 | 32 |
500 °C | 4 | 53 | 43 | 7 | 57 | 36 | 75 | 7 | 18 | 7 | 54 | 39 | 5 | 55 | 40 |
600 °C | 5 | 51 | 44 | 8 | 56 | 36 | 63 | 9 | 28 | 8 | 54 | 38 | 6 | 55 | 39 |
