Figure 1 | Scientific Reports

Figure 1

From: A piezoelectric micro generator worked at low frequency and high acceleration based on PZT and phosphor bronze bonding

Figure 1

Fabrication process of micro generator.

(a) Silicon oxide deposited on silicon wafer. (b) Bonding phosphor bronze and silicon wafer and thinning down the phosphor bronze by the mechanical lapping. (c) Bulk PZT with bottom electrode bonding with phosphor bronze. (d) Thinning down PZT by using the mechanical lapping and wet-etching combined method and polishing. (e) Top electrode deposition. (f) Top electrode patterning. (g) The backside etching by DRIE. (h) Tungsten mass assembling at the end of the cantilever.

Back to article page