Figure 4

Micro fabricated piezoelectric cantilever and assembled with PCB.
(a) The bending status of the fabricated piezoelectric cantilever. (b) Micro fabricated piezoelectric device assembled with PCB.

Micro fabricated piezoelectric cantilever and assembled with PCB.
(a) The bending status of the fabricated piezoelectric cantilever. (b) Micro fabricated piezoelectric device assembled with PCB.