Table 1 Dimension of the designed micro generator.

From: A piezoelectric micro generator worked at low frequency and high acceleration based on PZT and phosphor bronze bonding

Structural layers

Geometrical parameters (μm)

Value

Phosphor bronze

Length

12000

Width

6000

Thickness

57

PZT

Length

11000

Width

5000

Thickness

57

Tungsten mass

Length

5500

Width

1920

Thickness

2400

Silicon mass

Length

6000

Width

1920

Thickness

4400

epoxy

Thickness

4

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