Figure 3
The θ-2θ XRD patterns of the AlN layers treated with the Ar plasma power of (a) 100 W, and (b) 300 W, and the treatment time of 10, 20, and 40 sec, during the in-situ ALA in each ALD cycle.
Figure 3 | Scientific Reports
The θ-2θ XRD patterns of the AlN layers treated with the Ar plasma power of (a) 100 W, and (b) 300 W, and the treatment time of 10, 20, and 40 sec, during the in-situ ALA in each ALD cycle.
