Thermal scanning probe lithography (tSPL) is a nanofabrication method for the chemical and physical nanopatterning of a large variety of materials and polymer resists. Riedo and colleagues introduce the main features of tSPL, define the most critical patterning parameters and describe post-patterning analysis of the obtained results.
- Edoardo Albisetti
- Annalisa Calò
- Elisa Riedo
