Novel digital memory devices were fabricated with a new photo-patternable polyimide (PI), poly(hexafluoroisopropylidenediphthalimide-4-cinnamoyloxytriphenylamine (6F-HTPA-CI). The finely patterned PI device cells demonstrated excellent programmable nonvolatile memory characteristics in three different modes (unipolar permanent memory, and unipolar and bipolar flash memories). Overall, this photopatternable polymer is very suitable for future energy-efficient, faster speed and high density nonvolatile memory devices in highly integrated systems.
- Suk Gyu Hahm
- Samdae Park
- Moonhor Ree