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A universal method for in situ control of stoichiometry and termination of epitaxial perovskite films

The authors report on a method for precise control of stoichiometry and surface termination during thin-film growth of a wide range of perovskite ABO₃ phases that exploits dynamic B-site layer inversion seen in the in situ electron diffraction.

Bruce A. Davidson
Aleksandr Yu. Petrov
Ke Zou
ResearchOpen Access29 Sept 2025
Nature Communications

Volume: 16, P: 1-10

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A universal method for in situ control of stoichiometry and termination of epitaxial perovskite films

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