Metal–insulator–metal electrostatic nanocapacitors can be fabricated in anodic aluminum-oxide nanopores using atomic layer deposition. This approach gives a planar capacitance of up to ∼100 µF cm−2 — substantially higher than previously reported values for nanostructured electrostatic capacitors.
- Parag Banerjee
- Israel Perez
- Gary W. Rubloff
