Using only conventional semiconductor processing on a silicon wafer, researchers successfully fabricate an on-chip resonator with a record Q-factor of 875 million — around 20 times higher than previous results. They also demonstrate stimulated Brillouin lasers as an example application to emphasize the size control feature of the fabrication method and the ultrahigh-Q available from these resonators.
- Hansuek Lee
- Tong Chen
- Kerry J. Vahala