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Advanced filters: Author: Sung-Tsun Wang Clear advanced filters

  • The doping and threshold voltage modulation of 2D transistors remain challenging. Here, the authors report a wafer-scale optical-thermal method combining ultraviolet illumination and oxygen annealing to tune the threshold voltage of atomic-layer-deposited In2O3 transistors with 2 nm thickness.

    • Robert Tseng
    • Sung-Tsun Wang
    • Der-Hsien Lien
    ResearchOpen Access
    Nature Communications
    Volume: 14, P: 1-8