Near-edge plasma treatment of Hf0.5Zr0.5O2 capacitors results in dielectric permittivity of 921, stored charge density of 349 μC/cm2, and energy density of 584 J/cm3 when the material’s ferroelectricity abruptly disappears after polarization fatigue.
- Wen Di Zhang
- Zi Zheng Song
- An Quan Jiang