Extended Data Fig. 1: Illustration fabrication process.
From: An adaptive moiré sensor for spectro-polarimetric hyperimaging
(a) Vias drilling and coating. (b) Photonic crystal (PhC) fabrication. (c) MEMS process. (d) Vapour releasing. (e) Top layer fabrication and bonding. Blue: Silicon. Grey: Silicon oxide. Purple: Silicon Nitride. Orange: Conductive layer. Yellow: SU-8.
