Extended Data Fig. 3: Import pattern geometry and set dimensions.

Screen capture of the NanoFrazor software displaying a typical setup of pattern geometry. Here, a bitmap is loaded, and the pixel size is set in the NanoFrazor software, for which 20 nm × 20 nm is a typical value. The user then sets the depth range for the pattern. Here, the range is set to 30–70 nm into the surface to provide 40 nm of modulation depth and 30 nm of buffer for etching. The pattern is then imported.