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Fabrication and characterization of optoelectronic in-sensor computing devices

Nature Protocols (2025)Cite this article

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Abstract

Bioinspired in-sensor computing devices can process information at sensory terminals by leveraging physical principles, thereby reducing latency and energy consumption during computation while simultaneously enhancing the efficiency of data processing and real-time analysis. Optoelectronic devices exhibit in-sensor computing functions, such as feature enhancement and data compression, by tuning the defect states of the semiconductor channels and thereby modulating the photoresponsivity and time constants of the sensors. These functionalities are critically dependent on precise fabrication and testing protocols. Here we present a detailed procedure for fabricating and characterizing in-sensor computing devices based on nanoscale semiconductor thin films. We explain how to test such optoelectronic devices, including the testing of visual adaptation and motion perception responses. When using semiconductor materials obtained from commercial suppliers, this procedure is time efficient and results in highly reproducible device performance. Nevertheless, all device fabrication and testing steps are generalizable and can be extended to other semiconductor thin films grown using different methods. The procedure is intended for researchers experienced in cleanroom operations and microfabrication techniques and can be completed in ~14 d. The use of bioinspired optoelectronic devices enables the development of a framework for advancing in-sensor computing technologies.

Key points

  • The first section of the procedure details the fabrication of sensors with features for the control of interface defects and quality, which enable the trapping and detrapping of carriers necessary for in-sensor computation.

  • The second section of the procedure details optoelectronic characterizations of the device, including electrical characterization, optoelectronic response characterization and bioinspired in-sensor computing characterization.

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Fig. 1: Functionality and application demonstration of optoelectronic in-sensor computing phototransistor array.
Fig. 2: Schematic of the fabrication process flow.
Fig. 3: The primary process for wet transfer and etching of MoS2 film.
Fig. 4: Verification of the MoS2 phototransistors.
Fig. 5: Electrical characterization of the MoS2 phototransistors.
Fig. 6: Optoelectronic property characterization of the MoS2 phototransistors.
Fig. 7: Bioinspired in-sensor computing characterization for visual adaptation.
Fig. 8: Bioinspired in-sensor computing characterization for motion perception.
Fig. 9: Transfer curves and parameter comparison of different MoS2 phototransistors.

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Data availability

The main data supporting this protocol are available in our previous publications4,5 and can be obtained from the corresponding author upon reasonable request. Source data are provided with this paper.

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Acknowledgements

This work is supported by National Natural Science Foundation of China (grant no. 62425405), MOST National Key Technologies R&D Programme (grant no. SQ2022YFA1200118-04), Research Grant Council of Hong Kong (grant no. CRS_PolyU502/22) and The Hong Kong Polytechnic University (WZ4X and CD9J).

Author information

Authors and Affiliations

  1. Department of Applied Physics, The Hong Kong Polytechnic University, Hong Kong, China

    Guang Zeng, Sijie Ma, Tianqing Wan, Hongye Chen, Jiewei Chen & Yang Chai

  2. Joint Research Center of Microelectronics, The Hong Kong Polytechnic University, Hong Kong, China

    Guang Zeng, Sijie Ma, Tianqing Wan, Hongye Chen, Jiewei Chen & Yang Chai

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  1. Guang Zeng
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Contributions

Y.C. conceived the idea. G.Z., S.M. and H.C. developed the protocol and performed the fabrication and testing. G.Z., S.M., T.W. and J.C. compiled the experimental data. G.Z., T.W. and H.C. designed video supplements. G.Z. and Y.C. cowrote the manuscript. All the authors discussed the results and contributed to writing this manuscript.

Corresponding author

Correspondence to Yang Chai.

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Nature Protocols thanks Wenzhong Bao and the other, anonymous, reviewer(s) for their contribution to the peer review of this work.

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Key references

Liao, F. et al. Nat. Electron. 5, 84–91 (2022): https://doi.org/10.1038/s41928-022-00713-1

Chen, J. et al. Nat. Nanotechnol. 18, 882–888 (2023): https://doi.org/10.1038/s41565-023-01379-2

Supplementary information

Supplementary Video 1

Visual aid for Step 12 of the Protocol—scratching four corners and pressing thermal release tape.

Supplementary Video 2

Visual aid for Step 14 of the Protocol—separating the sample and rinsing thermal release tape.

Source data

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Zeng, G., Ma, S., Wan, T. et al. Fabrication and characterization of optoelectronic in-sensor computing devices. Nat Protoc (2025). https://doi.org/10.1038/s41596-025-01262-5

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