Table 2 Summary of inter-chip edge coupler devices
From: Advances in waveguide to waveguide couplers for 3D integrated photonic packaging
Package | Design | IL (dB) | Pol. | 1-dB Toler. (μm) | 1-dB BW (nm) | L × W × H (μm) | Thru. | Process | Ref. | ||
|---|---|---|---|---|---|---|---|---|---|---|---|
| Â | Â | Â | Â | Lateral | Vertical | Long. | Â | Â | Â | Â | Â |
SOI to SOIa | H-bar MMI | 0.32 0.56 | TE TM | / | / | / | >40(1530–1570) | 241 × 2 × 5 | Parallel | Custom | |
Ge-on-Si to Ge-on-Si | OCQ | 4.1 | / | ±2 | ±1.25 | 0.5 | / (8400) | 16 × 12 × 4 | Parallel | Custom | |
III-V to SOI | Trident taper | 2 | / | ±1.4 | ±0.35 | 1.4 | 60 (1490–1550) | 96 × 9.6 × 0.22 | Parallel | Standard | |
InP to SOI | Inverse taper | 0.25 | / | ±0.7 | ±0.5 | / | 120 (1510–1630) | 75 × 0.4 | Parallel | Standard | |
InP to SOI | Meta-material | 0.9 | / | ±1.7 | ±0.5 | / | 120 (1510–1630) | 250 × 0.4 | Parallel | Standard | |
Polymer to polymera | MMI | 1.0 | / | ±2 | / | / | 90 (1510–1600) | 173 × 4 × 10.4 | Parallel | New | |
Si3N4 to ULI | Inverse taper | 2.8 | / | ±1.5 | ±1.8 | / | / (1550) | 200 (L) | Serial | New | |
InP to SOI | Inverse taper | 1.6 | / | ±1.5 | ±1 | / | 45 (1515–1560) | 600 × 3 | Parallel | Standard | |
GaSb to SOI | Angled facet & taper | 1.46 | TE | >±1 | ±0.13 | 0.75 | / (1881–1947) | 200 × 6 × 1 | Parallel | Custom | |
GaSb to SOI | Angled facet & taper | 2.7 | TE | / | / | / | / (1955–1992) | 200 × 6 × 1 | Parallel | Custom | |
GaSb to SOI | Angled facet | 1.8 | TE | ±0.45 | ±0.97 | 1.46 | / (2000) | 5 × 3(W × H) | Parallel | Standard | |
InP to SiN | Inverse taper | 1.5 | / | ±0.5 | ±0.4 | 1.1 | / (1550) | 2.15 (W) | Parallel | Standard | |
Polymer to polymera | MMI | 7.05 | / | / | / | / | / (1550) | 486 × 18 × 18 | Parallel | New | |
SiNx to SiNx | GRIN | 0.33 0.41 | TE TM | ±2.38 | ±2.24 11(rise) | / | >360(1280–1640) | 66 × 11 × 11 | Parallel | Custom | |
SOI to SOI | GRIN | 0.35 0.43 | TE TM | ±2.38 | ±2.24 11(rise) | / | >360(1280–1640) | 66 × 11 × 11 | Parallel | Custom | |
GaSb to SOI | Angled facet | 1.94 | / | / | / | 1.59b | / (2000) | 3.1 × 5.4(W × H) | Parallel | New | |
Polymer to polymera | MMI | 2.4 | / | ± 0.5c | 23(rise) | / | 40 (1300–1340) | 3223 × 7.7 × 22.5 | Parallel | New | |