Table 3 Summary of inter-chip grating coupler devices
From: Advances in waveguide to waveguide couplers for 3D integrated photonic packaging
Package | Period (nm) | IL (dB) | Pol. | 1-dB Toler. (μm) | 1-dB BW (nm) | L × W (μm) | Thru. | Process | Ref. | |
|---|---|---|---|---|---|---|---|---|---|---|
| Â | Â | Â | Â | Lateral | Vertical | Â | Â | Â | Â | Â |
SOI to SOI | 586 | 2.8 | / | ± 2 | / | ± 15 (1543) | 40 × 25 | Parallel | Standard | |
SOI to SOI | 632 | 6.0 | / | ±3 | / | ± 40 (1550) | 10 × 10a | Parallel | Standard | |
SOI to SOI | 630 | 8.0 | / | ±1.5 | ± 0.2 | <± 6 (1550) | 10 × 10 | Parallel | Standard | |
SOI to SOIb | 820 (along) 390 (lateral) | 6.02 | / | / | / | ±5 (1560) | 20.5 × 13 | Parallel | Custom | |
SOI to SiNb | 600 (Si) 1000 (SiN) | 2.03 | TE | ± 0.25 | ± 0.1 | <10 (1470) | 12 × 18 | Parallel | Custom | |
SiN to SiN | 930 | 3.87 | / | / | / | ±100 (1550) | 25.79 × 25.79 | Parallel | Standard | |
SOI to SOI | / | 4.0 | / | ± 2 | / | < ± 10 (1310) | / | Parallel | Standard | |
a-Si to a-Sib | 640 | 0.81 | TE | / | >4 | 30 (1570–1600) | 12 × 5 | Parallel | Custom | |
SOI to SOI | / | 5.9 | / | ± 2.25 | ±1 | < ± 7 (1505) | / | Parallel | Standard | |
SOI to SOI (no reflector) | 534 | 4.8 | / | ± 2.44 | <0.25 | ± 42.5 (1310) | 15 × 15 | Parallel | Standard | |
SOI to SOI (reflector) |  | 0.4 |  | ± 4.53 | <0.1 | ± 17.5 (1310) |  |  | New |  |
SOI to SOI | 528 | 0.94 | / | / | / | 21 (1539–1560) | 20 × 20 | Parallel | Standard | |
