Table 4 Summary of inter-chip free form couplers
From: Advances in waveguide to waveguide couplers for 3D integrated photonic packaging
Package | Design | IL (dB) | Pol. | 1-dB Toler. (μm) | 1-dB BW (nm) | L × W × H (μm) | Thru. | Process | Ref. | ||
|---|---|---|---|---|---|---|---|---|---|---|---|
L (μm) | V (μm) | ∠(°) | |||||||||
InP to SMF | Wet etch mirror | 8.6 11.3 | TE TM | / | / | / | < ± 0.5 (1550) | 12 × 15 × 5 | Parallel | Custom | |
InP to SMF | FIB etch mirror | < 9 | / | / | / | / | / | 4 (W) | Serial | Custom | |
InP to SOI | Mirror & grating | 0.71 | / | ± 2 | ± 1 | / | 80 (1505–1585) | / | Parallel | Custom | |
SiOx to polymer | Mirror & lens | 2.6a | TE TM | ± 1.5 | ± 5 | / | 100 (1500–1600) | 24 (L) | Serial | New | |
Polymer to MMF | 41° Ti-Cu mirror | 1.05 1.89 1.69 | / | / | / | / | / (805) / (1310) / (1550) | 6 × 6.5(W × H) | Serial | New | |
Polymer to SOI | 2.43 | ± 2 | 30 | ±1. 5b | ± 20 (1550) | ||||||
SOI to SMF | Grating & lens | 6.5 | / | ± 7.5 | 700 | ± 0.5 | ± 5 (1310) | 275 (W) | Parallel | Custom | |
Polymer to polymer | TPP mirrors | 0.22 0.25 | TE TM | ± 1.3 | 35 | / | ± 200 (850) | 10 × 30 | Serial | New | |
Si3N4 to Si3N4 | TPP mirrors | 0.49 | TE | / | / | / | 390 (1300–1690) | 140 × 80 × 24 | Serial | New | |
Si3N4 to SMF | TPP mirrors | 1a | TE | ± 2.2 | 20 | 2.2 | 300 (1340–1640) | 140 × 80 × 24 | Serial | New | |
Polymer to SOI | Imprint/GSL mirrors | 3.6 | / | ± 2.5 | / | / | ± 80 (1550) | 320 × 14 × 19 | Parallel | New | |
Laser to SMF | DNA pyramids | 0.71 | / | / | / | / | / (450) | < 10 × 10 | Parallel | New | |
Polymer to SOI | mirror & grating | 18.7 | / | / | / | / | / (1265) | 31 × 11 × 28 | Serial | New | |
InP to SOI | TPP mirrors | 2.5 | TE | ± 3 | ± 2.25 | / | ± 70 (1550) | 82 × 38(W × H) | Serial | New | |
SOI to SMF | TPP mirrors | 0.8 3 | TE TM | ± 2 | 19 | / | > 180(1460–1640) > 130(1510–1640) | 135 × 70 × 27 | Serial | New | |
