Table 9 Summary of photonic vias

Polymer to polymer

Glass

TIR mirrors

<0.5

± 2.5^a ± 5° (mirror ∠)

/

/ (850)

50 (new)

New

²⁰¹

SOI to SOI

Si

Grating & reflector

1.3

/

/

/ (1550)

13 × 5

Custom

¹⁹⁷

SOI to a-Si

Si

TIR mirrors

8.4

< ± 0.12

<2

/ (1550)

0.5 × 0.8

Custom

¹⁶³

SOI to SOI

Si

Grating & reflector

0.96

± 2

± 0.13^b

±10 (1550)

20 × 11

Custom

³⁶⁵

SOI to a-Si

Si

TIR mirrors

1.42

/

10

/ (1550)

0.3 × 1.9

Custom

³⁶⁶

Polymer to polymer lens

Glass

Mirror & lens

1.3^c

±16–19^d

±210^e

/ (850)

230 (W)

Custom

^218,222

Polymer to VCSEL/PD

Organic

Mirror & lens

1.6 to 3.3

/

/

/ (985)

35 (W)

New

²²⁶

Mirror & lens

<1.5

± 75

/

^{227,228,229,230}

Organic & Si

Mirror & lens

2 to 2.5

± 40 (Rx) ± 25 (Tx)

/

/ (850)

150 (W)

New

²³¹

IOX to VCSEL/PD

Glass

Mirror & lens

1.73 to 4.32

/

100

/ (1550)

254 (W)

New

^219,252,367

Polymer to VCSEL/PD

Organic

Mirror & lens

1.6 to 2.9

± 12

/

/ (850)

45 (W)

New

²³²

Polymer to SOI

Glass

Mirror, lens, & grating

0.62^c

± 3^d ± 4° (mirror ∠)

/

/ (1550)

60 (W)

New

²⁰⁸

SOI to polymer

Si

Mirrors

0.75

± 1.5^f

>200

/ (1310)

20 × 14

New

²⁰⁵

SOI to polymer

Organic

Grating, ball lens & mirror

3.4

± 14

/

± 10 (1310)

300 (W)

New

²⁰⁶

SOI to SOI lens

Si

Grating, reflector & lens

5.35^g

± 2.5^g

/

± 5 (1310)

275 (W)

Custom

²⁰⁷