Fig. 3: Epitaxial Growth and Characterization of Sample 1.

a The growth temperature of each layer is shown, with the red and blue lines representing two different samples; b The transmission electron microscopy image; c Measured secondary ion mass spectrometry (SIMS); d Atomic force microscope; e Photoluminescence spectrum before and after annealing; f Statistical PL peak wavelength, peak intensity, full width, and indium component at a six-inch wafer