Fig. 4: Epitaxial growth and characterization of Sample 2.

a Measured secondary ion mass spectrometry (SIMS); b Atomic force microscope; c Photoluminescence spectrum before and after annealing; d Statistical PL peak wavelength, peak intensity, full width, and indium component at a six-inch wafer; e High-resolution X-ray diffraction of the two samples; f Statistical full width at half maximum of different diffraction peaks