Fig. 5: Atomic-level microscopic analysis of the two samples. Sample1.

a Electron Diffraction Pattern; b, c HAADF image; d The atomic intensity distribution on the cross-section of the quantum well; Sample2: e Electron Diffraction Pattern; f, g HAADF image; h The atomic intensity distribution on the cross-section of the quantum well; i, j XRD diffraction and their peak position FWHM of three full-structure wafers from the same furnace batch