Fig. 2: 2.5D micropore-array Parylene C membrane and the filtration system.

a A single membrane packaged for single-layer filtration. b An assembly with a homemade PMMA holder containing four membranes with different pore sizes/diameters for multi-layer filtration applications. c Easy handling of the fabricated filtration membrane with tweezers. d Photographs of the Parylene C membranes prepared with and without the annealing treatment