Fig. 3: SEM images of the 2.5D micropore array Parylene C membranes. | Microsystems & Nanoengineering

Fig. 3: SEM images of the 2.5D micropore array Parylene C membranes.

From: 2.5-Dimensional Parylene C micropore array with a large area and a high porosity for high-throughput particle and cell separation

Fig. 3: SEM images of the 2.5D micropore array Parylene C membranes.

SEM images of the a1 cross-sectional view and a2 surface of Parylene C microstructures on the silicon template after RIE and a3 released Parylene C membrane prepared via conventional molding. SEM images of the a4 cross-sectional view and the a5 surface of Parylene C microstructures on the silicon template and a6 released Parylene C membrane obtained after the RIE stage of the modified molding process. SEM images of the a7 cross-sectional view and a8 surface of Parylene C microstructures on the silicon template and a9 released Parylene C membrane obtained before the RIE stage of the modified molding process. b Membranes with diameters/spaces of cases 5 (b1) and 6 (b2) in Table 2. b3 Image showing the steep sidewall profiles and excellent flexibility properties of the fabricated 2.5D micropore-array Parylene C membrane with high porosity. SEM images of the b4 surface and b5 inclined cross-sectional view of the Parylene C membrane with an aspect ratio of approximately 7.5. b6 Image showing the steep sidewall profiles and excellent flexibility properties of the fabricated 2.5D micropore-array Parylene C membrane with a high aspect ratio. b7 A combination of the hexagonal and square micropores. SEM images of the Parylene C membranes with a rectangular pattern (b8) and a triangle pattern (b9)

Back to article page