Fig. 4: Calculation and simulation for the mechanical characterization of the 2.5D micropore array Parylene C membranes.

a The measured filtration throughput of PBS driven by gravity with the prepared 2.5D micropore-array Parylene C membranes of different porosities, cases 1–4 in Table 2. b Equivalent Young’s modulus values obtained for the flat non-porous Parylene C film and 2.5D micropore-array Parylene C membranes with pore diameters/spaces of case 2 in Table 2, which were prepared with and without annealing treatment at a temperature of 320 °C in a nitrogen atmosphere for 2 h. c Numerical simulation of hydraulic pressure and shear stress. d Calculated pressures applied to the 2.5D micropore-array membranes (left y-axis, red) with different porosities and the corresponding micropore size variations (right y-axis, blue) observed during the actual filtration process