Fig. 5: Fabrication of the device and equivalent circuit model.
From: Concept and proof for an all-silicon MEMS micro speaker utilizing air chambers
a Schematic process flow for the fabrication of the micro loudspeaker. The NED actuator shows an arrangement of three electrodes, each separated by an electrode gap. The electrodes are separated electrically by spacers made of alumina (ref. 13). b Equivalent circuit model of the micro speaker based on electrostatic bending actuators (NED). c Acoustic loads used. The ear simulator is taken from the literature18. The pure cavity condition represents a capacitor of 2.1 pF equivalent to a 297 mm3 volume
