Fig. 2: Illustration of the fabricated design of the parallel interferometers integrated on the same chip.
From: On-chip parallel Fourier transform spectrometer for broadband selective infrared spectral sensing
a The chip-scale architecture of the MEMS spectrometer, comprising four interferometers and a comb-drive actuator. The interferometers are denoted by Int. and numbered from 1 to 4. The moving mirrors of all interferometers are attached to the same moving arm. The light path is indicated by the red arrows. b A SEM image of the actuator. c A SEM image of the moving mirror arm. d A SEM image of an optical interferometer. e A camera photo of the corresponding fabricated die with the coupling fibres, where the yellow arrows represent the input directions of the light to the interferometers and the red arrows represent the output direction of the light
