Fig. 2: Resonant frequency analysis of the fiber scanner before attaching a silicon spring.

a Schematic of the fiber scanner with the silicon mass structure. The fiber length (L) and the silicon mass length (ML) mainly determine the resonant frequencies. b Calculated and measured resonant frequencies depending on L and ML. The L and ML for over 1-kHz resonant frequency are displayed as filled circles. c Scanning amplitude of a resonating fiber tip. The L and ML for over 1-kHz resonant frequency are colored in pink. d Frequency response of the fiber scanner for L = 7 mm and ML = 0.5 mm. The resonant frequency is 1050Hz with a Q-factor of 82 and a full-width scanning bandwidth of 200 Hz. e 1D scanning lines showing mechanical cross-coupling. Scale bar = 500 μm