Fig. 4: Fabrication results.

a SEM image (top left) of the chip (top right) and pivot-input beams of the optimized orthogonal design: AMPACC with orthogonal “pivot-input beam area”. b SEM image (bottom left) of the chip (bottom right) and pivot-input beams of the optimized freeform design: AMPACC with freeform “pivot-input beam area”