Fig. 5: Experimental tests. | Microsystems & Nanoengineering

Fig. 5: Experimental tests.

From: Design of freeform geometries in a MEMS accelerometer with a mechanical motion preamplifier based on a genetic algorithm

Fig. 5

a Output signals of the FD and OD for a range of ±1g. The linear fits were plotted using the least squares method. The nonlinearities of both designs were 3% in the worst case. b Dynamic range linearity measurements for the FD and OD using a mechanical shaker that varied the acceleration amplitude from 0.5 to 7g at 100Hz with a step of 0.5g. The results indicate a nonlinearity of 3% up to approximately ±7g. c Frequency responses of the FD and OD. d Cross-axis sensitivities of the two designs under 1g acceleration at 100Hz. The cross-axis sensitivity of the FD is 1.350% (0.960V/g in the y-axis, 0.013V/g in the x-axis). e Cross-axis sensitivities of the two designs under 1g acceleration at 100Hz. The cross-axis sensitivity of the OD is 1.500% (0.400V/g in the y-axis, 0.006V/g in the x-axis). f Input-referred noise floor PSD of the FD and OD

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