Table 3 Gaps between elements in the design and anchor sizes are assumed to be constants for the optimization process

From: Design of freeform geometries in a MEMS accelerometer with a mechanical motion preamplifier based on a genetic algorithm

Cross-section point

A

B

C

D

Cross-section width

(1 + WRpb)*Wp

(1 + WRpm)*Wp

WL

(1 + WRLAm)*WL

Cross-section point

E

F

G

 

Cross-section width

WL

(1 + WRim)*Wi

(1 + WRib)*Wi

 
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