Table 4 Constraints imposed by the geometry on the design parameters

From: Design of freeform geometries in a MEMS accelerometer with a mechanical motion preamplifier based on a genetic algorithm

1

LLA > Lac/2Op + Wi/2

2

LLA < LM/2Op − Wi/2

3

Ls1 < LF + OF − WR/2 + WSa − Ws/2

4

Ls2 > 2*(Ws/2)+ gML

5

Ls3 < Ls1 + Wo/2 + WR/2 + LF + OF + WSa + gMS + LM/2

6

Ws < WL

7

d2 > 2*d1