Table 7 Comparison between the simulated and experimental result of the optimal OD and FD

From: Design of freeform geometries in a MEMS accelerometer with a mechanical motion preamplifier based on a genetic algorithm

 

Sensitivity

Bandwidth

SWBP

Experiment

OD

0.400 V/g

0.534 kHz

0.214

FD

0.964 V/g

0.444 kHz

0.428

Relative change

141%

−17%

100%

 

Sensitivity

Resonant frequency

SWBP

Simulation

OD

0.412 μm/g

0.943 kHz

0.389

FD

1.010 μm/g

0.705 kHz

0.712

Relative change

145%

−25%

83%

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