Table 1 Dimensions of the microstructure.
Dimension | Value | Dimension | Value |
|---|---|---|---|
Outer radius of the sphere (μm) | 1000 | Inner radius of the sphere (μm) | 530 |
Radius of the rod (μm) | 175 | Height of the rod (μm) | 3500 |
Thickness of the beam (μm) | 40 | Length of the beam (μm) | 1000 |
Width of the beam (μm) | 120 | Width of the mass square (μm) | 600 |
